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Semiconductor AOI Machine

-- Used to detect defects, particles of semiconductor chips
-- Image collection with high precision cameras

Applicable Products
-- Semiconductor
-- Panel
Product parameters

Operators

0 person (On-line, fully automated)

X Y axis accuracy

5 um

Z axis accuracy

2 um

Image resolution

1 um

Auto focusing accuracy

0.01 mm

Throughput

0.5 s/chip

Dimensions (WDH)

1,500*1,050*1,700 (mm)